| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of forming a coating film by which a uniform coating film is formed without incorporating bubbles even on a substrate on which fine projecting and recessed parts are formed or which has remarkably low surface energy or the contrast of the surface energy. SOLUTION: A coating liquid 4 is injected into a space 11 in a chamber which faces a coating film forming surface of the substrate 10 after the chamber 1 in which the substrate 10 is mounted is evacuated to <=100 Pa.
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