| 摘要 |
<p>PROBLEM TO BE SOLVED: To facilitate the handling of fine parts, or an observation object by using a bimorph type piezoelectric device for a support mechanism for supporting a part or an irradiation object of a charged particle beam by its tip part and providing a moving means for moving this support mechanism. SOLUTION: A bimorph type piezoelectric device used for a tweezers mechanism as a support mechanism is formed by sandwiching two piezoelectric materials between three electrode plates and, when a voltage is applied thereon, the piezoelectric element is bent. This tweezers mechanism has a simple constitution and a small size so as to be suited to the utilization for holding a fine part. In this support system having the tweezers mechanism mounted thereon, three laminated type piezoelectric device blocks 3 are piled with their displacement direction inclined at 90 deg. respectively so as to be constituted into a triaxial manipulator. The laminated type piezoelectric device has small drift and hysteresis, while having high positional accuracy and being strong against vibration so that it is suited to the applications required highly precise positioning.</p> |
