发明名称 ENCAPSULATED MEMS BAND-PASS FILTER FOR INTEGRATED CIRCUITS AND METHOD OF FABRICATION THEREOF.
摘要 Communication signal mixing and filtering systems and methods utilizing an encapsulated micro electro-mechanical system (MEMS) device. Furthermore, disclosed is a method of fabricating a simple, unitarily constructed micro electro-mechanical system (MEMS) device which combines the steps of signal mixing and filtering, and which is smaller, less expensive and more reliable in construction and operation than existing devices currently employed in the technology.
申请公布号 MXPA01006272(A) 申请公布日期 2003.05.19
申请号 MX2001PA06272 申请日期 2001.06.19
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 KEVIN K. CHAN
分类号 B81B3/00;B81B7/00;B81C1/00;H03D7/00;H03H3/007;H03H9/10;H03H9/24;H03H9/46;H04B1/26 主分类号 B81B3/00
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