| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a wafer cooling chamber in which contact between a wafer and the 'inclining part' of a counterbore for cooling a wafer is prevented. SOLUTION: A wafer cooling chamber 12 and a counterbore 23 for cooling a wafer are disposed contiguously to a treatment chamber 10 and a support member 11 for opening/closing the chamber 10. A wafer support member is composed of a material selected from among quartz, alumina, ceramics, and SiC and placed at the counterbore for cooling the wafer. A wafer support pin has a wafer securing part extending to the side of wafer support part.</p> |
