| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a lift pin made of glass carbon. SOLUTION: This lift pin is provided with a hollow sheath made of SiC and a top made of glass carbon that is fitted into the sheath. When a susceptor ascends or descends, since a part of the pin which rubs on a through hole of the susceptor is made of the same material SiC as that of the susceptor, the lift pin can be prevented from being shaved by friction. A pin-like carbon-based SiC is entirely coated and formed into a lift pin, and its top is cut to expose the tip of the base. The lift pin with its tip exposed is heated in oxygen to remove the base and form a hollow, and the lift pin top made of glass carbon is fitted into the sheath.</p> |
