发明名称 BONDING DEVICE
摘要 PROBLEM TO BE SOLVED: To inhibit adverse effects in terms of vibration characteristics that a pneumatic pipe exerts on a transducer. SOLUTION: As a result of securing the pneumatic pipe 31 for suction to a pipe-mounting part 9 through a connecting member 50 comprising a foamed resin material, the effects of a reaction force from the pneumatic pipe 31 on the ultrasonic vibration of an ultrasonic horn 1 can be inhibited well. This is considered due to the fact that the mass (m) and the coefficient of viscosity (c) of the foamed resin material comprising the connecting member 50 are remarkably small, compared with these values of metal and a non-foamed resin material, so as to inhibit the effects of the reaction force on the ultrasonic vibration with high acceleration (a) and velocity (v), when the reaction force F is defined as: F equals ma plus cv plus kx (m = mass, a = acceleration, c = coefficient of viscosity, v = velocity, k = spring constant and x = displacement).
申请公布号 JP2003142532(A) 申请公布日期 2003.05.16
申请号 JP20010336011 申请日期 2001.11.01
申请人 SHINKAWA LTD 发明人 NISHIURA SHINICHI;OTAKA KAZUHIRO
分类号 H01L21/60;B23K20/10;H01L21/607;(IPC1-7):H01L21/60 主分类号 H01L21/60
代理机构 代理人
主权项
地址