| 摘要 |
PROBLEM TO BE SOLVED: To provide a projection optical system, an aligner having projection optical system, device manufacturing method and device with which the low absorption gas is purged effectively with a simplified structure and optical performance of the projection optical system, which is assembled and adjusted with higher accuracy being maintained, even after the apparatus is loaded. SOLUTION: The projection optical system for projecting a pattern, on the object surface to the image surface comprises a lens barrel for holding an optical element and a cabinet, which includes the lens barrel for forming the first space of the atmosphere, which is different from the outside. The lens barrel provides the projection optical system, having a support for supporting the projection optical system.
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