发明名称 IMAGE SENSOR AND MANUFACTURING METHOD THEREOF
摘要 PURPOSE: An image sensor and a method for manufacturing the same are provided to be capable of improving photo sensitivity without using sophisticated processes. CONSTITUTION: A pixel including a light receiving element(32) is formed on a semiconductor substrate(30). A metal line(34) and a dummy metal pattern are formed on the first interlayer dielectric(33). The second interlayer dielectric(35) has a groove formed on the light receiving element while maintaining the topology of the metal line and the dummy metal pattern. An SOG(Spin On Glass) layer(36) having a concave part(200) is filled into the groove. The third interlayer dielectric(37) and a passivation layer(38) are sequentially formed on the second interlayer dielectric and the SOG layer. A planarization layer(39) is formed on the passivation layer. A convex microlens(40) is formed on the planarization layer.
申请公布号 KR20030037859(A) 申请公布日期 2003.05.16
申请号 KR20010068949 申请日期 2001.11.06
申请人 HYNIX SEMICONDUCTOR INC. 发明人 LEE, SANG JU
分类号 H01L27/146;(IPC1-7):H01L27/146 主分类号 H01L27/146
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