SEMICONDUCTOR DEVICE AND IT MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To device an electrically effective contact part and its manufacturing method capable of expanding the contact area of the contact part and preventing the generation of a contact punching trouble even when misstep margin between a plug and lower wiring is reduced. SOLUTION: A cell plate electrode 12 composed of a TiN film is formed on a 4th inter-layer insulating film 10. Then a 5th inter-layer insulating film 13 is formed on the electrode 12. These laminated films are etched by using etching gas obtained by adding CF4 to C5 F8 +O2 +Ar to form a contact hole 16a so that the etching cross section of the electrode 12 becomes like a taper.