| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma generating device which can perform a good electron cyclotron resonance heating. SOLUTION: The plasma generating device comprises a container (1), an electromagnetic field generating part (2), a pipe (5), input parts (3, 6, 8, 9), and a dielectric substance (7). Gas is sealed in the container (1) to which, an inlet for inputting electromagnetic wave is formed. The magnetic field generating part (2) generates magnetic field (B0 ) in a first direction (X) in the container (1). The pipe (5) is mounted to the inlet of the container (1). The input parts (3, 6, 8, 9) input electromagnetic wave for generating plasma (P) into the container (1). The dielectric substance (7) is arranged inside the pipe (5) and guides the electromagnetic wave by magnetic field (B0 ) so that the plasma (P) has an uniform density. |
