| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a vacuum sucker and its manufacturing method in which the vacuum sucker can be manufactured easily with high yield and the circumferential edge of a sample can be corrected to have a highly accurate surface. SOLUTION: The vacuum sucker 100 comprises a vacuum sucking part 110 provided with a large number of protrusions 111 for supporting a sample 130 on its rear surface except the circumferential fringe thereof, and a seal part 120 provided around the vacuum sucking part 110 and supporting the sample 130 at the circumferential fringe thereof, wherein a center line average surface roughness at the sample support part of the seal part 120 is set in a range of 1-20μm.</p> |
