VACUUM TREATMENT UNIT AND METHOD FOR TREATING OBJECT TO BE TREATED

摘要

PROBLEM TO BE SOLVED: To provide a vacuum treatment unit in which residual charges are not stored on a substrate even if the electrostatic attraction of a substrate is repeated and the substrate can be attracted stably. SOLUTION: The vacuum treatment system 1 comprises first and second treatment chambers 4 and 5 each having an electrostatic chuck 70 capable of attracting a substrate 2 electrostatically and is arranged to perform prescribed treatment while attracting the substrate 2 to an electrostatic attraction chuck 70 electrostatically under vacuum, a carrying chamber 7 provided with a robot 50 capable of carrying the substrate 2 to the first and second treatment chambers 4 and 5 and arranged to be introduced with a prescribed ionization gas and evacuated, and a UV light irradiating unit 60 disposed at such a position in the carrying chamber 7 as the substrate 2 can be irradiated with UV-rays capable of ionizing the ionization gas from the electrostatic attraction side.