| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that a specified value cannot be changed and comprehensive determination performed with the arbitrary number of measured chips cannot be made, since a semiconductor integrated circuit is measured for each chip based on the specified value that is determined by a test program in advance. SOLUTION: The determination apparatus comprises a measurement means 4 and a quality determination means 8. In the measurement means 4, measurement power is supplied to a chip that is conveyed to a measurement position by a transport means 7 of a semiconductor integrated circuit, it is determined whether the chip is good in quality or not regarding measurement items by a prespecified value based on measurement data obtained from the chip, and a measurement result and measurement data are outputted. In the quality determination means 8, the measurement data are inputted with the coordinates signal of the chip, and the quality of the chip is determined based on the specified value that differs from the previous one regarding measurement items other than the previous one.
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