| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that the temperature of the electrode section of a pressurized heater is not lowered sufficiently only through heat radiation by means of cooling fins when the heater is used at a temperature of 550-600 deg.C, because the heater must be used at a temperature of >550 deg.C when the heater is used for Au-Au bonding though the heater is used at a temperature of <400 deg.C in conventional mounting work using ACFs. SOLUTION: A heat insulating material is constituted to cool the electrode section of the pressurized heater by forming a cooling gas flowing passage extended to the electrode section in the material and forming a cooling hole in the front end of the material for cooling the electrode section.
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