| 摘要 |
PROBLEM TO BE SOLVED: To obtain a high frequency power supply for supplying high frequency power to such a load as the impedance may be varied abruptly, e.g. a plasma processing system, in which under power supply to the load is prevented upon abrupt change of load impedance. SOLUTION: The high frequency power supply 1 comprising a DC power supply section 1A and a DC/high frequency AC converting section 1B is provided with a circuit 1C for discharging a smoothing capacitor C at the output end of the DC power supply section 1A forcibly. Furthermore, a means for suppressing output from an inverter INV2 by operating the switch element of the inverter INV2 in an active region upon detection of a transient variation in the impedance of the load 2 in the reducing direction is also provided. |
