发明名称 UNMANNED TRANSFER VEHICLE
摘要 PROBLEM TO BE SOLVED: To solve the problem that it is difficult to engage an engaging member to a member to be engaged for preventing an article placement stand from being supported easily since the article placement stand that is supported by an antivibration means is rocked and vibrated not only in a vertical direction but also in a horizontal direction immediately after an unmanned vehicle stops, in the unmanned vehicle comprising the antivibration means that is included between a vehicle body and the article placement stand, a plurality of engaging members that are provided at either the vehicle body or the article placement stand, a member to be engaged that opposes the member to be engaged that is provided at the other, an elevation means for elevating either the engaging member or the member to be engaged, and a transfer apparatus for transferring an article that is placed on the article placement stand. SOLUTION: A V groove for guiding the engaging member (pin) 62 to a prescribed position is provided in the member (block piece) 61 to be engaged, and at the same time the direction of the V groove of at least one member 61 to be engaged is directed toward a different direction relative to the V groove of the other members to be engaged.
申请公布号 JP2003142548(A) 申请公布日期 2003.05.16
申请号 JP20010333170 申请日期 2001.10.30
申请人 TOKYO ELECTRON LTD;MURATA MACH LTD 发明人 AKIYAMA SHUJI;MURAYAMA TAKAHIKO
分类号 B61D27/00;B61D47/00;B65G1/00;H01L21/677;H01L21/68;(IPC1-7):H01L21/68 主分类号 B61D27/00
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