发明名称 CMOS IMAGE SENSOR AND MANUFACTURING METHOD THEREOF
摘要 PURPOSE: A CMOS image sensor and a method for manufacturing the same are provided to be capable of improving photo sensitivity of short wavelength and capacitance of a photodiode. CONSTITUTION: A semiconductor substrate(30) of the first conductive type is defined to a transfer transistor region(T) and a photodiode region(P). The first and second field oxide layer(31,32) are formed on the substrate of the photodiode region(P). A deep N- impurity region(35) is formed in the substrate(30) of the photodiode region(P). At this time, the deep N- impurity region(35) has a step difference by forming shallowly at lower part of the field oxide layers(32).
申请公布号 KR20030037871(A) 申请公布日期 2003.05.16
申请号 KR20010068963 申请日期 2001.11.06
申请人 HYNIX SEMICONDUCTOR INC. 发明人 HUH, EUN MI
分类号 H01L27/146;(IPC1-7):H01L27/146 主分类号 H01L27/146
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