| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a wafer carrying hand for grasping and carrying a wafer stably in a clean room while suppressing the rattling and generation of powdery dust at the guide of a movable part. SOLUTION: The inclination of a movable part is suppressed at the time of operation using a linear guide and a plurality of grip claws 5 fixed to the movable part for grasping a wafer 12 can be adjusted in position and replaced. The movable part is covered through a slight gap and air can be sucked through a suction port provided in the cover and discharged to the outside of a clean room.</p> |
