| 摘要 |
PROBLEM TO BE SOLVED: To provide an aligner and an exposure system which can easily decide processing algorithm optimum for the image data of an image-picked-up mark and can properly position a mask and a substrate. SOLUTION: The aligner STPn is equipped with a camera 33, which picks up the image of the mark 31 provided at the substrate P, an image processor 34 which processes by specified algorithm the image data of the mark 341 picked-up by the camera 33, a positioning part 35 which position the mask and the substrate P, based on the processing result of the image processor 34, and a communication means 24 which transfers the image data picked-up by the camera 33 to a controller 12. The image data of the mark 31 picked-up with the camera 33 is transferred to the controller 12 by the communication means 23, and the transferred image data are analyzed with the controller 12. |
