| 摘要 |
PURPOSE: To provide an electrode device for the field emission electron source corresponding to a duty drive of which an element size is 50 μm or less per element, and a manufacturing method of the electrode device. CONSTITUTION: This is the electrode device in which glass that becomes a catalyst for generating carbon nanotube is formed on the substrate, thereby, formation and discrete control of a metallic catalyst in nanometer level becomes possible, and carbon nanotube is generated through discrete control, and by performing metallic coating on the nanotube, an electrode device that is improved in electric pulse response characteristics is made, and a manufacturing method for the electrode device is provided. |
