| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an operating method of a substrate washing-apparatus for satisfactorily securing high throughput when using a plurality of treatment containers for performing a plurality of treatment processes. SOLUTION: A sheet washing apparatus includes a washing process for washing using washing liquid supplied from a washing unit, a rinse process for rinsing the washing liquid using rinse liquid, and a dry process for drying using a fluid for drying. Each of the processes is carried-out successively for allowing one substrate accommodated in a treatment container to be subjected to washing treatment. At this time, a washing unit having one set of washing tanks, pumps, and filters and at least two treatment containers are used, each process is separately assigned to the substrate that is arranged in each treatment apparatus, and each process is carried-out in parallel.</p> |
