SHEET HEAT TREATMENT DEVICE AND HEAT TREATMENT METHOD

摘要

PROBLEM TO BE SOLVED: To provide a heat treatment device and a heat treatment method by which a preheated member can be prevented from being damaged and heat treatment can be appropriately conducted. SOLUTION: This heat treatment device 100 is provided with a heat treatment container 1 where a susceptor 2 on which a wafer W is placed and a preheated member 6 surrounding the outer circumference of the susceptor are arranged inside and a gas supply inlet 4 is formed, and a heater 3 to heat the wafer W that is placed on the susceptor from the outside of the heat treatment container 1. In this case, the preheated member 6 is formed like a major arc surrounding a half or larger of the outer circumference of the susceptor 2.