VIBRATION ISOLATING COUPLING HAVING ELASTOMER DIAPHRAGM FOR SCANNING ELECTRON MICROSCOPE

摘要

PURPOSE: A vibration isolating coupling having an elastomer diaphragm for a scanning electron microscope is provided to increase the efficiency of wafer inspection by isolating vibration in actuating a transfer chamber with placing the coupling between the inspection chamber and the transfer chamber and forming vacuum with preventing inflow of atmospheric pressure. CONSTITUTION: In a measuring system(10), a coupling is situated between a floating inspection chamber(12) and a fixed carrier chamber(14). The coupling comprises a first flange coupled to the inspection chamber, a second flange making no contact with the first flange and mounted on the carrier chamber, an outer peripheral edge region fixed at the first flange, and an inner peripheral edge region fixed at the second flange. As a result, an annular diaphragm is provided to intercouple the flanges and close a space between the flanges. Clamps are provided to fix the outer peripheral edge region and the inner peripheral edge region of the diaphragm at the first flange and the second flange, respectively.