METHOD FOR FABRICATING MONOLITHIC INK JET PRINTER HEAD

摘要

PURPOSE: A method for manufacturing a monolithic ink jet printer head is provided to simplify a manufacturing process of the monolithic ink jet printer head by integrally forming components, such as a nozzle and an ink path, with a substrate. CONSTITUTION: A heating element(112) is formed in order to generate bubbles on a predetermined surface of a substrate(110) by heating ink. A negative photoresist(120) is coated on the substrate(110) formed with the heating element(112) by a predetermined thickness. Then, a first exposure process is carried out by using a first photo mask, in which a part forming a sidewall of a fluid path forming wall(120a) is over-exposed so that the part is cured. Then, a second exposure process is carried out by using a second photo mask(132) through exposing a part forming an upper wall of the fluid path forming wall(120a). Then, a remaining part of the negative photoresist(120) is removed by using solvent.