| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an X-ray generating device capable of restraining destruction and performance fluctuation of an optical element by efficiently preventing debris, having a stable X-ray output. SOLUTION: The X-ray generating device, generating X-ray according to the plasma generated by the irradiation of excitation energy on a target member, has a shield type debris prevention means located near to the irradiation point of the X-ray of which, at least the part except the part necessary for taking out the X-ray is shielded; a filter type debris prevention means located more backward than the shield type debris prevention means from the irradiation point, preventing the debris while transmitting the X-ray, or a mirror type debris prevention means preventing the debris while transmitting the X-ray; and a third debris prevention means located between the shield type debris prevention means and the filter type debris prevention means or the mirror type debris prevention means, prolonging the life of the filter or the mirror by preventing the debris getting to the filter type debris prevention means or the mirror type debris prevention means.</p> |
