SEMICONDUCTOR MANUFACTURING SYSTEM, METHOD FOR SUPPLYING HIGH FREQUENCY TO SEMICONDUCTOR MANUFACTURING UNIT AND HIGH FREQUENCY DISTRIBUTOR

摘要

PROBLEM TO BE SOLVED: To remove impurities from an electrostatic chuck without the sacrifice of economy or productivity. SOLUTION: The semiconductor manufacturing system comprises a plurality of semiconductor manufacturing units 10 each comprising an electrostatic chuck 20 for holding a wafer W with a Coulomb's force due to potential difference, and a chamber 30 internally generating an electric field upon application of a voltage from the other system and bringing a prescribed supply gas into a plasma state, and a high frequency distributor 60 for distributing a high frequency for cleaning outputted from a high frequency power supply 101 to the electrostatic chucks 20 of the plurality of semiconductor production units 10.