发明名称 POROUS GETTER DEVICES WITH REDUCED PARTICLE LOSS AND METHOD FOR THEIR MANUFACTURE
摘要 A method for reducing the loss of particles from the surface of porous getter bodies is taught herein. The method consists in producing on the surface of the porous getter a thin layer of a metal or metal alloy with a deposition technique selected among the deposition of materials from arc generated plasma, ionic beam deposition and cathodic deposition. The deposition technique allows for granular or columnar surface of the covering material but still allowing access to the surface of the getter material, resulting in a reduced getter particle loss.
申请公布号 KR20030038765(A) 申请公布日期 2003.05.16
申请号 KR20037004244 申请日期 2003.03.24
申请人 发明人
分类号 B01J20/02;C23C14/16;B22F3/11;C22C1/04;C22C14/00;C22C16/00;C23C4/08;C23C4/12;C23C14/14;C23C14/24;C23C14/34;C23C14/46;F04B37/04;H01J7/18 主分类号 B01J20/02
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