| 摘要 |
PURPOSE: A crucible-type effusion cell for organic molecular beam deposition is provided which enables thin film deposition process requiring fine thickness control and is applied to an organic thin film deposition equipment sensitive to temperature change by controlling temperature control deviation of the effusion cell within ±0.1 deg.C. CONSTITUTION: The crucible-type effusion cell for organic molecular beam deposition comprises a support part for fixing crucible, a heat generation part for heating the circumference of the crucible, a cooling jacket for emitting heat accumulated according to excessive heating, and a vacuum flange on which the support part, heat generation part and cooling jacket are mounted, wherein resistance wire is used as a heating element (1), a heating resistance wire is vertically arranged to uniformly transfer heat to the circumference of an external crucible (4), a molded high purity ceramic (2) is used to insulate continuously connected resistance wire, an evaporation source is stored in an internal crucible (3) made of quartz, a graphite crucible (external crucible) (4) is formed on the outer wall of the internal crucible (3) so that heat generated from the heating element (1) is transferred to the crucible fast and uniformly, and actual temperature deviation is reduced to within ±0.1 deg.C according to setting temperature, a temperature sensor (7) is installed between the quartz crucible and graphite crucible to finely control the setting temperature in the allowable temperature deviation range, and a radiation plate (5) is installed on the circumference of a heat source to minimize external emission of heat emitted from the heat source.
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