Cleaning sheet and method for a probe

摘要

A cleaning sheet has a base sheet, a foamed layer of a porous material on the base sheet and a polishing layer formed on the foamed layer. The foamed layer includes abrading particles and air bubbles. Such a cleaning sheet may be produced by preparing a paint having air bubbles dispersed inside by mechanically foaming a foaming material containing a foaming resin material and abrading particles, forming on the base sheet a foamed layer having abrading particles dispersed inside by coating a surface of the base sheet with this paint and drying it, and forming a polishing layer on the foamed layer. A probe having a tip may be cleaned with such a cleaning sheet by causing a surface of its polishing layer to be pressed against the tip of the probe and causing the tip of the probe to penetrate the polishing layer and further to be inserted into the foamed layer having abrading particles dispersed inside.