发明名称 Large scale process control by driving factor identification
摘要 Systems and methods of complex process control utilize driving factor identification based on nonlinear regression models and process step optimization. In one embodiment, the invention provides a method for generating a system model for a complex process comprised of nonlinear regression models for two or more select process steps of the process where process steps are selected for inclusion in the system model based on a sensitivity analysis of an initial nonlinear regression model of the process to evaluate driving factors of the process.
申请公布号 US2003093762(A1) 申请公布日期 2003.05.15
申请号 US20020244154 申请日期 2002.09.13
申请人 RIETMAN EDWARD A.;CARD JILL P. 发明人 RIETMAN EDWARD A.;CARD JILL P.
分类号 G05B13/02;G05B17/02;G05B19/418;(IPC1-7):G06F17/50;H01L21/66 主分类号 G05B13/02
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