发明名称 MICROWAVE PLASMA GENERATOR
摘要 A microwave plasma generator including field-enhancing electrodes consisting of opposed laminae (108,109) with a gap (110) between them orthogonal to the direction of propagation through the plasma generator of microwave radiation. Gas inlet (106) and outlet (107) ports are arranged so that a gaseous medium to be excited into the plasma state passes through the gap (110).
申请公布号 WO03041111(A1) 申请公布日期 2003.05.15
申请号 WO2002GB04865 申请日期 2002.10.25
申请人 ACCENTUS PLC;GILLESPIE, ROBERT, FREW;HALL, STEPHEN, IVOR;SHAWCROSS, JAMES, TIMOTHY 发明人 GILLESPIE, ROBERT, FREW;HALL, STEPHEN, IVOR;SHAWCROSS, JAMES, TIMOTHY
分类号 H05H1/46;B01J19/08;H01J37/32;(IPC1-7):H01J37/32 主分类号 H05H1/46
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