| 摘要 |
In a method and an apparatus for measuring process errors capable of reducing the process errors, and a method and an apparatus for measuring an overlay, at least two regions are assigned on an object to be measured, which has been passed through a predetermined unit process. Process error values of each region are detected. Error correcting values of each region are calculated based on the process error values. The calculated error correcting values are fed back to a device performing the predetermined unit process. The process error values are merged and outputted as one file. The error correcting values of each region formed on the object are reflected in the device performing the unit process, so the process failure generated in each region of the object can be reduced when the unit process is performed.
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