| 摘要 |
In a method of coating workpieces in a vacuum chamber, a workpiece is exposed to a plasma, and the resulting reaction products or decomposition products of the process gas are deposited on the workpiece. This method is characterized in that two poles, one of which is the workpiece itself or an electrode situated directly behind the workpiece and the other is a counter-electrode, are acted upon by an alternating voltage in the frequency range of 10 kHz to 100 MHz to produce the plasma between the poles, and a stream of process gas is directed onto the workpiece through an orifice in the counter-electrode.
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