发明名称 Integrated circuit comprises first lines on first plane, and second lines on second plane
摘要 An integrated circuit comprises first lines (220) on a first plane (260); and second lines (225) on a second plane (265). At least one of the first or second lines comprises a non-rectangular cross-section. An Independent claim is also included for the production of an integrated circuit. Preferred Features: At least one of the first or second lines comprises a non-vertical side wall which tapers toward the other side wall. At least one of the first or second lines has a triangular cross-section. The second lines of the second plane are arranged over the first lines of the first plane.
申请公布号 DE10245179(A1) 申请公布日期 2003.05.15
申请号 DE2002145179 申请日期 2002.09.26
申请人 INFINEON TECHNOLOGIES AG 发明人 MUELLER, GERHARD;PARK, YOUNG-JIN
分类号 H01L23/522;H01L23/528;(IPC1-7):H01L23/522;H01L21/768 主分类号 H01L23/522
代理机构 代理人
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