发明名称 |
Integrated circuit comprises first lines on first plane, and second lines on second plane |
摘要 |
An integrated circuit comprises first lines (220) on a first plane (260); and second lines (225) on a second plane (265). At least one of the first or second lines comprises a non-rectangular cross-section. An Independent claim is also included for the production of an integrated circuit. Preferred Features: At least one of the first or second lines comprises a non-vertical side wall which tapers toward the other side wall. At least one of the first or second lines has a triangular cross-section. The second lines of the second plane are arranged over the first lines of the first plane.
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申请公布号 |
DE10245179(A1) |
申请公布日期 |
2003.05.15 |
申请号 |
DE2002145179 |
申请日期 |
2002.09.26 |
申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
MUELLER, GERHARD;PARK, YOUNG-JIN |
分类号 |
H01L23/522;H01L23/528;(IPC1-7):H01L23/522;H01L21/768 |
主分类号 |
H01L23/522 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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