发明名称 Method for producing semiconductor light emitting device and semiconductor light emitting device produced by such method
摘要 A method for producing a semiconductor light emitting device, including at least one first column-like multi-layer structure provided on a substrate and containing gallium nitride-based semiconductor compound semiconductor layers represented by the general formula InxGayAlzN (where x+y+z=1, 0<=x<=1, 0<=y<=1, 0 <=z<=1), includes a first step of forming a plurality of grooves in the substrate; and a second step of forming a plurality of first column-like multi-layer structures on the substrate so as to be separated by the grooves.
申请公布号 US2003092210(A1) 申请公布日期 2003.05.15
申请号 US20020286055 申请日期 2002.11.01
申请人 KOIDE NORIKATSU 发明人 KOIDE NORIKATSU
分类号 H01L21/205;H01L33/06;H01L33/08;H01L33/20;H01L33/32;H01L33/34;H01L33/44;(IPC1-7):H01L21/00 主分类号 H01L21/205
代理机构 代理人
主权项
地址