发明名称 |
Semiconductor device used in integrated circuits comprises a substrate with a first conductor strip, an insulating layer on the first strip, and a second conductor strip on the insulating layer |
摘要 |
Semiconductor device comprises a substrate (1) with a first conductor strip (3), an insulating layer (4) on the first strip, and a second conductor strip (9) on the insulating layer. A voltage can be applied between the two strips. The insulating layer is deposited in a thickness of 2-10 nm using a PECVD process so that a short circuit is produced between the two strips when a higher voltage than the normal operating voltage is applied and a permanent electrical connection is formed between the conductor strips. An Independent claim is also included for a process for the production of the semiconductor device. Preferred Features: The insulating layer is 2-4 nm thick and is made from oxidized silicon nitride or oxidized amorphous silicon. The higher voltage is 3-10 V.
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申请公布号 |
DE10153608(A1) |
申请公布日期 |
2003.05.15 |
申请号 |
DE2001153608 |
申请日期 |
2001.11.02 |
申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
VOGT, MIRKO |
分类号 |
H01L23/525;(IPC1-7):H01L23/525;H01L21/768 |
主分类号 |
H01L23/525 |
代理机构 |
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