Layer system used for transparent substrates comprises a partial layer of a mixed oxide of zinc oxide, titanium oxide and a further oxide, and further metal and/or oxide layers with functional silver layers

摘要

Layer system, especially low energy layer system for transparent substrates, especially glass panes, comprises at least one partial layer of a mixed oxide of ZnO, TiO2 and at least one further oxide, and further metal and/or oxide layers, especially with one or more functional silver layers. Preferred Features: The mixed oxide layer is 2-20 nm thick and is produced by reactive cathode sputtering from a metal alloy target having 90-40 weight % Zn, 10-60 weight % Ti, and 0.5-8 weight % of one or more of the metals Al, Ga and Sb. The alloy target consists of 71 weight % Zn, 27 weight % Ti and 2 weight % Al, or 56 weight % Zn, 42 weight % Ti and 2 weight % Al.