| 摘要 |
Deviation signals (Ex, Ey, Ez, Ethetax, Ethetay, and Ethetaz) are sent to PI compensators (7) for respective motion modes. Position control is done by the operation of each PI compensator (7) so as to eliminate the deviation signal. Gain compensators (4) regarding the stiffness receive velocity signals (Vx, Vy, Vz, Vthetax, Vthetay, and Vthetaz), and apply the skyhook stiffness for the respective motion modes. A motion mode distribution calculating unit (8) regarding an air spring converts the sum of a sign-inverted output from each gain compensator (4) and an output from a corresponding PI compensator (7) into a driving signal for each air valve (AV). Power amplifiers (10) drive the air valves (AV) in accordance with outputs from the motion mode distribution calculating unit (8). The air valves (AV) control the internal pressures of air springs (SU). Vibration suppression forces generated by the air springs (SU) so act as to hold a vibration damping table (13) at a predetermined position and apply the skyhook stiffness.
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