| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical scanner capable of super-miniaturization and high speed driving. SOLUTION: This optical scanner comprises a base substrate; an oblong frame formed on the base substrate; a stage formed in the H shape, and disposed swingably around a shaft inside of the frame; a supporting portion for supporting swingably the stage; and a stage driving body for driving the stage. The stage driving body comprises a comb-shaped electrode (moving comb electrode) formed to be vertical to a bottom surface of the stage; and a comb-shaped electrode (fixed comb electrode) formed on the substrate to be engaged with the moving comb electrode. When a current flows in the comb electrodes, the stage is swingably driven by an electrostatic attracting force produced between the moving comb-shaped electrode and the fixed comb-shaped electrode. These electrodes have the comb shape and have a large superficial area, so that the stage can be easily driven by a current weaker than a conventional one.
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