| 摘要 |
PROBLEM TO BE SOLVED: To improve the measurement accuracy of a total internal reflection cancellation angleθSP in a sensor utilizing total internal reflection attenuation in a configuration for obtaining the total internal reflection cancellation angleθSP based on the result of differentiation of a light detection signal that is detected by a plurality of light receiving elements regarding the side-by-side placement direction of the light receiving elements. SOLUTION: The sensor utilizes total internal reflection attenuation comprising a dielectric block 10, a light source 14 for generating light beams 13, an optical system 15 for applying the light beams 13 to obtain various kinds of incident angles to an interface 10b between the dielectric block 10 and a metal film 12, a light detection means for detecting the light beams 13 that are totally reflected on the interface 10b and are set parallel, and the like. In the sensor, an optical filter is provided between the dielectric block 10 and the light detection means 17, and a position where reflection light intensity that is detected by the light detection means 17 is minimized is set nearly symmetrical to the axis.
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