| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a poly(imide-benzoxazole) (PIBO) copolymer using, as raw materials, a trimellitic anhydride halide monomer and a bis(o- diaminophenol) monomer. SOLUTION: This PIBO copolymer has the following repeating unit, wherein X is-O-,-S-,-C(CF3 )2 -,-C(CH3 )2 -,-CO-,-CH2 -,-SO2 -,-SO-, or a bond; and n is an integer. This PIBO copolymer has a hydroxy group having excellent adhesion to semiconductor substrates, and is particularly useful for dielectric layers of semiconductor devices.</p> |
