| 摘要 |
PROBLEM TO BE SOLVED: To simultaneously solve two problems of collecting data required to stabilize quality and speedily inspecting a defect. SOLUTION: This device for inspecting a defect has a group of inspection stations comprising a plurality of different inspection means and a plurality of jigs, a host computer to determine inspection results, a result collecting part to totalize detailed results, and a storage means to preserve the results, and every time the group of the inspection stations are indexed, the host computer reflects the individual inspection result obtained by successively carrying out inspection in each inspection means in a matrix region disposed on a shared memory wherein a jig number allocated to a plurality of jigs corresponds to each inspection means on 1 to 1 basis, and the result collecting part successively reads out the contents of the region. Thereby, a plurality of inspection results for an object to be inspected is housed in the storage means. |
