发明名称 FIXED ABRASIVE GRAIN
摘要 PROBLEM TO BE SOLVED: To provide a fixed abrasive grain which can polish an object to leave it almost free from metal contamination. SOLUTION: The fixed abrasive grain comprises a metal or a metal compound at a content of 100 ppm or less so that the object can be polished to have an even and mirror-like surface.
申请公布号 JP2003138247(A) 申请公布日期 2003.05.14
申请号 JP20010336189 申请日期 2001.11.01
申请人 EBARA CORP 发明人 HIROKAWA KAZUTO
分类号 C09K3/14;(IPC1-7):C09K3/14 主分类号 C09K3/14
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