| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a micro device with a soft, fragile and extremely fine resin diaphragm, especially a method of manufacturing the device with a diaphragm type valve, or a diaphragm pump. SOLUTION: This method of manufacturing the micro fluid device having the resin diaphragm comprises (i) a step of forming a film like first member by solidifying a first member forming material on a support body; (ii) a step of laminating and adhering the first member on the support body and a second member through an adhesive; and (iii) a step of removing the support body from the first member and transferring the first member to the second member. The first member having the resin diaphragm and the second member reaching a member surface and having a deficit portion forming a fluid flow passage are laminated and adhered with the adhesive, so that the deficit portion and the resin diaphragm are piled with the deficit portion forming surface serving as an adhesive surface, and the deficit portion forms the flow in an interval with the first member.
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