APPARATUS FOR DETECTING A ROTATION ANGLE OF A DIFFRACTION GRATING,申请号EP19950940420-传众专利搜索

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发明名称	APPARATUS FOR DETECTING A ROTATION ANGLE OF A DIFFRACTION GRATING
摘要
申请公布号	EP0758075(B1)	申请公布日期	2003.05.14
申请号	EP19950940420	申请日期	1995.12.13
申请人	ANRITSU CORPORATION	发明人	KAKIMOTO, TATSUKI
分类号	G01D5/28;G01D5/30;G01D5/38;G01J3/06;G01J3/18;(IPC1-7):G01B11/26;H01S3/137	主分类号	G01D5/28
代理机构		代理人
主权项
地址

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