METHOD OF FORMING A CYCLIC OPTICAL PATH, OPTICAL GYRO USING THE SAME AND AN INERTIA SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a cyclic optical path forming method which can relatively reduce a mirror adjusting step for creating an optical path as compared with a conventional construction using a mechanical structure material and allows batch production, so that mass production and reduction in price can be devised, and also provide an optical gyro and an inertia sensor using the method. SOLUTION: Reflection mirrors 2 to 5 for reflecting light vertically to a coherence laser source and a substrate 1 are formed by anisotropic etching, and clockwise and counterclockwise cyclic optical paths 6, 7 are formed and an optical ring circuit is constructed by the cyclic optical paths 6, 7.