发明名称 Lithographic apparatus and device manufacturing method
摘要 A lithographic projection apparatus comprising a radiation system and/or a projection system having at least one optical member (13), wherein the optical member (13) is supported by and connected to a mounting frame (11) which at least partially encloses the optical member (13) and which is connected to at least one other component of the radiation system and/or the projection system. <IMAGE>
申请公布号 EP1310829(A1) 申请公布日期 2003.05.14
申请号 EP20020257697 申请日期 2002.11.06
申请人 ASML NETHERLANDS B.V. 发明人 FRANKEN, DOMINICUS JACOBUS PETRUS ADRIANUS
分类号 G03F7/20 主分类号 G03F7/20
代理机构 代理人
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