| 摘要 |
A particle-beam column comprising a needle-type ions source (1) such as a liquid metal ion source, one or more round lenses (2), and a plurality of interleaved quadrupole lenses (14, 16). Also an ion-beam column comprising a liquid alloy ion source (1), interleaved quadrupole lenses (14, 16), and a Wien velocity filter (22). Such columns produce a more finely focused beam than columns based only on electrostatic lenses, and allow increased lens apertures and larger beam currents. |
