| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a vacuum control valve that accurately controls a small flow rate. SOLUTION: In the vacuum control valve, a blocking body 5 inserted into a valve port 2 having a inner wall 6 wherein an elastic seal ring 7 is arranged comprises a cylinder part 8 having a first end part 9 and a second end part 10; and a cone enlarged diameter part 11 adjacent to the second end part 2. A groove 15 having a starting point at the position apart from the second end part 10 extends to the second end part. The groove 15 gradually widens over its entire body and gradually increases in depth. A step motor 21 controls the position of the blocking body 5 to control a flow rate based on the contact position of the elastic seal ring 7 and the groove 15.</p> |
