TEMPERATURE MEASURING METHOD AND METHOD AND APPARATUS FOR MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a surface temperature measuring method capable of accurately calculating the emissivity of a measuring object and capable of knowing an accurate temperature by a pyrometer. SOLUTION: The surface temperature measuring method has a process for measuring the radiation intensity of the certain part A of the measuring object by the pyrometer in such a state that the temperature of the part A is constant and a process for calculating the temperature of a part other than the part A. The emissivity of the part A is led out by performing the calculation of the heat balance A to determine the temperature of the part A.